238000000926 separation method Methods 0.000 description 3.230000005686 electrostatic field Effects 0.000 description 3.238000004519 manufacturing process Methods 0.000 description 14.238000010894 electron beam technology Methods 0.000 description 31.239000011163 secondary particle Substances 0.000 abstract description 2.230000000875 corresponding Effects 0.000 claims description 38.230000001846 repelling Effects 0.000 claims abstract description 17.239000002245 particle Substances 0.000 title claims abstract description 761.Publication of WO2022136064A1 publication Critical patent/WO2022136064A1/en Links Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority to EP20216927.2A priority Critical patent/EP4020516A1/en Priority to EP20216927.2 priority Priority to EP21174518.7 priority Priority to EP21174518 priority Priority to EP21191729.9 priority Priority to EP21191729 priority Application filed by Asml Netherlands B.V. Priority date (The priority date is an assumption and is not a legal conclusion. Inventor Marco Jan-Jaco Wieland Albertus Victor Gerardus MANGNUS Original Assignee Asml Netherlands B.V. Google Patents WO2022136064A1 - Charged particle optical device It should be noted that except for the $E \times B$ drift, all other drifts depend on the charge of the particle.WO2022136064A1 - Charged particle optical device
Another important case of drift is when the field lines of B are curved with nonconstant radius: in this case, the particles looping around the field lines of B will feel centrifugal force and will thus escape from the field line. If instead of E there is an external force, such as gravity, the drift is again in the direction of the force cross the magnetic field. In the above equation, $q$ gets simplified, so it has no influence on the average drift of the charged particle. The expected drift is given by the cross product of $\vec\right)